膜厚測定,分光測定,分光エリプソメトリー,スペクトル解析のテクノ・シナジー

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研究業績 - 「論文」

英文誌

7) T. Tadokoro, K. Akao, S. Okutani, M. Kimura, T. Akahane and Toriumi: "Quantitative Analysis of Nematic Director Reorientation Dynamics Studied by Time-Resolved Spectroscopic Ellipsometry", Jpn. J. Appl. Phys., 42 (2003) pp.4552-4563.
6) T. Tadokoro, T. Saiki and H. Toriumi: "Two-Dimensional Analysis of Liquid Crystal Orientation at In-Plane Switching SubstrateSurface Using a Near-Field Scanning Optical Microscope", Jpn. J. Appl. Phys., 42 (2003) pp.L57-L59.
5) T. Tadokoro, T. Saiki and H. Toriumi: "Design and Implementation of Near-Field Scanning Optical Microscope for Interfacial Liquid Crystal Observation", Jpn. J. Appl. Phys., 41 (2002) pp.L152-L154.
4) T. Tadokoro, K. Akao, S. Outani, M. Kimura, T. Akahane and H. Toriumi: "Surface Orientation of Liquid Crystals: Director Fluctuation and Optical Flickering Effect in Nematic Liquid Crystals studied by Total-Reflection Spectroellipsometry", Thin Solid Films, 393 (2001) pp.53-58.
3) T. Tadokoro, K, Akao, T. Yoshihara, S. Okutani, M. Kimura, T. Akahane and H. Toriumi: "Dynamics of Surface-Stabilized Ferroelectric Liquid Crystals at the Alignment Layer Surface studied by Total-Reflection Ellipsometry", Jpn. J. Appl. Phys., 40 (2001) pp.L453-L455.
2) T. Tadokoro, T. Saiki, K. Yusu, and K. Ichihara: "High-Resolution Examination of Recording Marks in Phase-Change Media Using a Scanning Near-Field Optical Microscope", Jpn. J. Appl. Phys., 39 (2000) pp.3599-3602.
1) T. Tadokoro, T. Fukazawa, and H. Toriumi: "Real Time Measurement of Liquid Crystal Reorientation Dynamics Using Polarization Modulated Spectroellipsometry", Jpn. J. Appl. Phys., 36 (1997) pp.L1207-L1210.
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和文誌

12)田所利康:「CD-Rとデジタルカメラを用いた分光器の試作」,光学,46, 6 (2017) 249.
11)田所利康:「第2章 光学特性の測定原理と測定法 2.6 分光エリプソメトリー(2)」, 成形加工,28, 3 (2016) pp102-106.
10)田所利康:「第2章 光学特性の測定原理と測定法 2.5 分光エリプソメトリー(1)」,成形加工,28, 2 (2016) pp62-67.
9) 田所利康:「物質中の光の振る舞いはどのように決まるのか (4) ー 光学異方性媒質中の光の進み方 ー」日本液晶学会誌 EKISHO, 17, 4 (2013) pp234-244.
8) 田所利康:「物質中の光の振る舞いはどのように決まるのか (3) ー 誘電関数って何だ ー」日本液晶学会誌 EKISHO, 17, 3 (2013) pp173-182.
7) 田所利康:「物質中の光の振る舞いはどのように決まるのか (2) ー 「媒質中で光は遅くなる」とは限らない ー」日本液晶学会誌 EKISHO, 16, 4 (2012) pp285-292.
6) 田所利康:「物質中の光の振る舞いはどのように決まるのか (1) ー 光と電子はダンスを踊る ー」日本液晶学会誌 EKISHO, 16, 3 (2012) pp216-224.
5) 田所利康:「分光エリプソメトリー:基礎から応用まで」, 日本画像学会誌, 50, 5 (2011) pp.439-447.
4) 田所利康:「入門講座 やさしいトライボ表面分析(12):エリプソメトリー」,トライボロジスト,51, 6 (2006) pp.450-455.
3) 田所利康:「液晶界面配向転移ダイナミクスの全反射エリプソメトリー測定」,光学,34, 5 (2005) pp.261-263.
2) 田所利康,木村宗弘,赤羽正志,鳥海弥和:「全反射エリプソメトリーによる界面液晶ダイナミクスの観察」,応用物理,73, 6 (2004) pp.759-763.
1) 田所利康:「近接場光学顕微鏡を用いた界面液晶配向の電場応答観察」日本液晶学会誌 EKISHO, 5, 4 (2001) pp299-307.
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関連論文(英文)

19) G. T. Dang, T. Yasuoka, Y. Tagashira, T. Tadokoro, W. Theiss, and T. Kawaharamura: "Bandgap engineering of α-(AlxGa1-x)2O3 by a mist chemical vapor deposition two- chamber system and verification of Vegard's Law", Appl. Phys. Lett. 113, 062102 (2018).
18) M. Kuwahara, R. Endo, K. Tsutsumi, F. Morikasa, T. Tsuruok, T. Fukaya, M. Suzuki, M. Susa, T. Endo, and T. Tadokoro: "Optical Measurement for Solid-and Liquid-Phase Sb2Te3 around Its Melting Point", Jpn. J. Appl. Phys. 52 (2013) 118001.
17) M. Kuwahara, R. Endo, K. Tsutsumi, F. Morikasa, M. Suzuki, T. Shima, M. Susa, T. Endo, T. Tadokoro, and S. Hosaka: "Spectroscopic Ellipsometry Measurements for Liquid and Solid InSb around Its Melting Point", Appl. Phys. Express 6 (2013) 082501.
16) M. Kuwahara, R. Endo, K. Tsutsumi, F. Morikasa, T. Tsuruoka, T. Fukaya, M. Suzuki, M. Susa, T. Endo, and T. Tadokoro: "Approach for measuring complex refractive index of molten Sb2Te3 by spectroscopic ellipsometry", Appl. Phys. Lett., 100 (2012) 101910.
15) H. Shima, K. Tsutsumi, M. Suzuki, T. Tadokoro, H. Naganuma, T. Iijima, K. Nishida, T. Yamamoto, T. Nakajima and S. Okamura: "Themooptic Property of Polycrystalline BiFeO3 Film", Jpn. J. Appl. Phys., 50 (2011) pp.09NB02-1-4.
14) A. Yamamoto, T. Miwa, M. Kawai, T. Tadokoro, K. Tsutsumi, T. Sato, S. Kodama, and K. Hayakawa: "Development of a Variable-wavelength Optical Rotation Detector in the Ultraviolet Region", Anal. Sci., 27 (2011) pp.799-803.
13) T. Tsuru, Y. Kubota, T. Tadokoro, S. Kawabata: "Development of spectroscopic transmission-type four detector polarimeter", Thin Solid Films, 519 (2011) pp.2707-2710.
12) H. Shima, T. Kawae, A. Morimoto, M. Matsuda, M. Suzuki, T. Tadokoro, H. Naganuma, T. Iijima, T. Nakajima and S. Okamura: "Optical Properties of BiFeO3-System Multiferroic Thin Films", Jpn. J. Appl. Phys., 48 (2009) pp.09KB01-1-4.
11) T. Sato, T. Araki, Y. Sasaki, T. Tsuru, T. Tadokoro and S. Kawakami: "Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements", Appl. Opt., 46 (2007) pp.4963-4967.
10) Y.Okumoto, N.Matsuhashi, M. Yoshida, T. Tadokoro, M.Kimura and T.Akahane, "Investigation of refractive indices of Free-Standing Films by ellipsometry", Molecular Crystals and Liquid Crystals, 413 (2004) pp.91-98.
9) M. Sakai, S. Mononobe, K. Yusu, T. Tadokoro and T. Saiki: "Observation of Amorphous Recording Marks Using Reflection-Mode Near-Field Scanning Optical Microscope Supported by Optical Interference Method", Jpn. J. Appl. Phys., 44 (2005) pp.6855-6858.
8) S. Okutani, M. Kimura, H. Toriumi, K. Akao, T. Tadokoro and T. Akahane: "Analysis of Totally Reflected Light from Liquid Crystal Cell using Renormalized Ellipsometry", Jpn. J. Appl. Phys., 40 (2001) pp.3288-3293.
7) S. Okutani, M. Kimura, T. Akahane, H. Toriumi, T. Tadokoro and K. Akao: "Analysis of Electrical Response of Nematic Liquid Crystal by Ellipsometry", Mol. Cryst. Liq. Cryst., 367 (2001) pp.691-700.
6) M. Kimura, S. Okutani, T. Churiki, T. Akahane, H. Toriumi and T. Tadokoro: "Determination of the Birefringence, the Twist Angle and the Thickness of the Nematic Liquid Crystal Sample by Renormalized Transmission Ellipsometry", Mol. Cryst. Liq. Cryst., 367 (2001) pp. 681-689.
5) S. Okutani, M. Kimura, T. Akahane, T. Tadokoro, K. Akao and Toriumi: "Observation of Nematic Liquid Crystal Director Reorientation at the Interface between Substrate and Liquid Crystal Layer by Total Reflection Ellipsometry", Jpn. J. Appl. Phys., 40 (2001) pp.244-249.
4) S. Okutani, M. Kimura, T. Akahane, H. Toriumi, T. Tadokoro and K. Akao: "Investigation fo Interfacial Liquid Crystal Orientation by Reflection Ellipsometry", Mol. Cryst. Liq. Cryst., 329 (1999) pp.269-281.
3) Y. Narita, T. Tadokoro, T. Ikeda, T. Saiki, S. Mononobe, and M. Ohtsu: "Subwavelength Spatial Resolution Measurement Using Near-Field Spectrometers", American Laboratory News Edition 31 (1999) pp.21-24.
2) Y. Narita, T. Tadokoro, T. Ikeda, T. Saiki, S. Mononobe and M. Ohtsu: "Near-Field Raman Spectral Measurement of Polydiacetylene", Appl. Spectrosc., 52, 9 (1998) pp.1141-1144.
1) T. Fukazawa, T. Tadokoro, T. Toriumi, T. Akahane and M. Kimura: "Application of Time-resolved Spectroellipsometry to the Study of Liquid Crystal Reorientation Dynamics", Thin Solids Films, 313/314 (1998) pp.799-802.
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関連論文(和文)

1) 桑原正史, 遠藤理恵, 堤浩一, 森笠福好, 深谷俊夫, 鶴岡徹, 須佐匡裕, 鈴木道夫, 遠藤智義, 田所利康:「高温溶融状態の光ディスク材料複屈折率測定」, 熱物性, 26, 3 (2012) pp128-135.
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